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Electron Microscopy Solutions
    

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Imaging Magnetic Materials with Helios NanoLab, Nova NanoSEM and Verios XHR

In recent years, the race for the highest resolution in scanning electron microscopy (SEM) has been driven by nanotechnology developments, new materials and smaller devices. Ultimate resolution can be approached by minimizing the focal length of the optical system, and one such method includes using an immersion lens. A magnetic immersion lens system delivers increased detection efficiency with the highest resolution at all accelerating voltages-without sensitivity to sample tilting. Recent developments have shown that sub-nanometer resolution can be achieved when combining the monochromated electron source of the Helios NanoLab™ and Verios™ with a magnetic immersion lens system, even with such low landing energies as 1 keV. This improvement enables similar resolution from 1 to 30 keV, meaning that operators only need to consider the information depth required, rather than limitations in resolution.

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