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flexProber Datasheet

flexProber™ is Thermo Fisher Scientific’s newest SEM based nanoprobing platform. It provides electrical characterization and fault isolation capability for process development, device design debug and failure analysis.

KEY BENEFITS

  • Platform Stability: Fast, repeatable probe motion control and low drift rates for stable electrical measurements.
  • Integrated System Operation: Guided work flows and software control of measurements and SEM setup for efficient operation
  • SEM column designed for nanoprobing: High resolution at low landing energies with large FOV

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