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Electron Microscopy Solutions
    

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Extreme High Resolution Electron Microscopy

The low-voltage scanning electron microscope (SEM) is widely used in many industrial and research applications due to its ability to image surface details with high resolution and fidelity. However, fundamental limitations in performance have existed, notably resolution at low beam voltages. To overcome this limitation, the Verios Extreme High Resolution (XHR) SEM was developed to reveal fine surface detail with sub-nanometer resolution at very low beam voltages. The Verios XHR SEM is ideally suited to help characterize electron beam sensitive photoresist. 

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