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Plasma cleaning is a new, rapid and effective method of removing contaminants from the specimen and specimen holder. It is of particular application in high-resolution transmission electron microscopy (HR-TEM), scanning transmission electron microscopy (STEM) or small-probe analytical electron microscopy (AEM) using X-ray (EDX) or energy-loss (EELS) analysis.
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A low-energy (10 - 15 eV) oxygen plasma chemically reacts with hydrocarbons adsorbed on the specimen and specimen holder converting them to CO, CO2 and H2O which are evacuated by the vacuum system. In practice, the input gas is a mixture of 25% oxygen and 75% argon.
The following accessories are included in this option: one pumping port assembly, one blank plug assembly, one specimen holder port, one specimen holder stand, and two vacuum storage containers.
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