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Fundamentals of Focused Ion Beam Nanostructural Processing: Below, At, and Above the Surface

This article considers the fundamentals of what happens in a solid when it is impacted by a medium-energy gallium ion. The study of the ion/sample interaction at the nanometer scale is applicable to most focused ion beam (FIB)–based work even if the FIB/sample interaction is only a step in the pr...

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Fundamentals of Focused Ion Beam Nanostructural Processing: Below, At, and Above the Surface

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