Product Families
FEI's product families push the boundaries of nanoscale imaging and discovery, enabling researchers and manufacturers to perform work more quickly, more precisely and more easily. Designed with a focus on the nanotechnology needs of key business segments, models within families include different features, providing a range of capabilities.
Phenom is a unique imaging tool that makes high-end imaging practical and affordable for a variety of applications. It combines light optical and electron optical technologies in one integrated, easy-to-use microscope system. Never before have you been able to get this level of image quality, resolution and sample throughput at such a low price point.
The Inspect Family offers two scanning electron microscopes (SEM), one with field emission gun (FEG) capabilities, to provide the ultimate in high-resolution imaging required for today’s advanced research and industrial applications involving material inspection and characterization.
The Quanta family of tools, with a variety of SEM/ESEM models and a DualBeam (FIB/SEM) system, offers advanced, flexible solutions that make it easy to explore any sample, whether non-conductive, moist, wet or dirty, in low-vacuum, high-vacuum or ESEM modes.
The Nova family provides three scanning electron microscopes (SEM) with ESEM technology, and two DualBeam™ (FIB/SEM) models, ideal for diverse characterization, analysis, nanostructure prototyping and sample preparation tasks.
The Helios NanoLab, a DualBeam for semiconductor and data storage labs, as well as industries and researchers facing today’s most challenging applications, combines the most advanced scanning electron microscope (SEM) and focused ion beam (FIB) technologies with innovative gas chemistries, detectors and manipulators.
FEI's Magellan™ XHR SEM allows scientists and engineers to quickly see things they could not see before, such as 3D surface images at many different angles and at resolutions below one nanometer. Most importantly, the Magellan XHR SEM images samples at very low beam energies, avoiding distortions otherwise caused by the beam penetrating into the material below. Across the board, the Magellan Family extends the range of nanoscale imaging and analysis, with the speed and ease-of-use of traditional SEMs.
Two DualBeam (FIB/SEM) systems that provide high-resolution characterization and analysis, as well as S/TEM sample preparation and imaging.
The Expida™ Family offers two full wafer DualBeam microscopes with 300mm capability for fast and accurate 3D defect characterization, failure analysis and transmission electron microscope (TEM) sample preparation.
The FEI V600FIB™ is the most efficient, flexible, and cost-effective circuit edit tool available for semiconductor labs. It enables fast, versatile modification and analysis with a single-column, focused ion beam (FIB) that effectively delivers high throughput circuit modification, cross-sectioning, and failure analysis.
The Morgagni™ 268(D) is an adaptable, easy-to-use transmission electron microscope (TEM) that delivers excellent image quality. The Morgagni delivers great value to the demanding scientific areas of cell biological research and diagnostic screening as well as being very suitable for pharmaceutical industrial applications.
Flexible TEM models designed specifically to provide ultra-high resolution sample characterization, analysis, and 3D tomographic imaging.
The Titan™ 80-300 kV TEM is a high-end imaging and analytical S/TEM instrument dedicated to corrector and monochromator technologies. The Titan was designed for optimum stability, enabling sub-Ångström imaging of nanostructures in both TEM and S/TEM modes.