Scanning electron microscope with superior high-resolution imaging for inspection and characterization
With advanced chamber vacuum technology, the Inspect Family of tools builds on FEI’s world-class electron optics and sample throughput technologies. When inspection, characterization, process control and failure analysis are important, the Inspect S and Inspect F models’ high-resolution imaging is a must. The intuitive user interface and software, with all functions required to record and store an image accessed directly via a tool bar, is well suited for a multi-user environment while full stage access to accommodate a range of specimen holders adds value and flexibility for a range of uses.
Featured Tools in the Inspect Family
The Inspect S [PDF 162KB] is the industry's leading low-vacuum scanning electron microscope (SEM) platform with high-resolution capabilities using thermal emission electron optics. While the low-vacuum settings are particularly useful for inspection and characterization of non-conductive and heavily contaminated materials, the system also minimizes sample preparation complexity for charge-free imaging and analysis. The Inspect S also has significant high-vacuum resolution that enhances its flexibility and ability to work with diverse sample types and a wide range of throughput.
For high-brightness, high-current, high-resolution imaging, the Inspect F [PDF 165KB], a SEM equipped with a Schottky Field Emission source, provides clear, sharp and noise-free imaging. In combination with the optimized analytical chamber geometry and its four-axis, motorized tilt, eucentric specimen stage, the high- and stable beam current makes this tool well suited for (automated) short- and long-time EDS, WDS and EBSD analysis and mapping. The system's excellent lateral resolution enables easy detection of low-Z elements at low beam energies, adding value and flexibility to the Inspect F.
Applications
The Inspect Family has excellent performers for applications similar to the following: